|ITEM METADATA RECORD
|Title: ||Effect of grown-in defects on the structure of oxygen precipitates in Cz-Si crystals with different diameter|
|Authors: ||Litovchenko, V.G|
Slobodjan, M.V #
|Issue Date: ||2008 |
|Host Document: ||Gettering and Defect Engineering in Semiconductor Technology XII pages:405-412|
|Conference: ||Gettering and Defect Engineering in Semiconductor Technology XII location:Erice Italy date:14-okt-2007|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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