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Title: Effect of grown-in defects on the structure of oxygen precipitates in Cz-Si crystals with different diameter
Authors: Litovchenko, V.G
Lisovskyy, I.P
Claeys, Cor
Kladko, V.P
Zlobin, S.O
Muravska, M.V
Efremov, O.O
Slobodjan, M.V #
Issue Date: 2008
Host Document: Gettering and Defect Engineering in Semiconductor Technology XII pages:405-412
Conference: Gettering and Defect Engineering in Semiconductor Technology XII location:Erice Italy date:14-okt-2007
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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