Title: Meeting the doping challenges: the case for plasma doping
Authors: del Agua Borniquel, Jose Ignacio
Poon, Tze
Porshnev, Pete
Jurczak, Malgorzata
Everaert, Jean-Luc
Vandervorst, Wilfried
Issue Date: 2008
Publisher: ICG Publishing Ltd
Series Title: Semiconductor Fabtech issue:37
ISSN: 1355-8633
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Nuclear and Radiation Physics Section

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