International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, Date: 2009/04/26 - 2009/04/26, Location: Napa, CA USA
Publication date:
2009-01-01
Proceedings of the International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
Author:
Mody, Jay
Duffy, Ray ; Eyben, Pierre ; Goossens, Jozefien ; Moussa, Alain ; Polspoel, Wouter ; Berghmans, Bart ; Van Dal, Mark ; Pawlak, Bartek ; Kaiser, Monja ; Weemaes, Robbert ; Vandervorst, Wilfried