Title: Solid-phase epitaxial regrowth of phosphorus implanted amorphized germanium
Authors: Simoen, Eddy
Brugere, Antoine
Satta, Alessandra
Van Daele, Benny
Brijs, Bert
Richard, Olivier
Geypen, Jef
Meuris, Marc
Vandervorst, Wilfried #
Issue Date: 2008
Host Document: Proceedings of the 214th ECS Meeting pages:2490
Conference: 214th ECS Meeting location:Honolulu, HI USA date:12-okt-2008
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Nuclear and Radiation Physics Section
# (joint) last author

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