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Title: Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process
Authors: Aarts, Arno
Srivannavit, Onnop
Wise, Kensall D
Yoon, Euisik
Pereira Neves, Hercules
Puers, Bob
Van Hoof, Chris #
Issue Date: 2010
Series Title: Proceedings of the 21st Micromechanics and Microsystems Europe Workshop - MME pages:165-168
Conference: 21st Micromechanics and Microsystems Europe Workshop - MME location:Enschede The Netherlands date:26-sep-2010
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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