Title: Fabrication technology for silicon based microprobe arrays used in acute and subchronic neural recording
Authors: Herwik, Stanislav
Kisban, Sebastian
Aarts, Arno
Seidl, Karsten
Girardeau, G
Benchenane, K
Zugaro, M.B
Wiener, S.I
Pereira Neves, Hercules
Paul, Olivier
Ruther, Patrick #
Issue Date: 2008
Host Document: Proceedings of the 19th MicroMechanics Europe Workshop - MME pages:57-60
Conference: 19th MicroMechanics Europe Workshop - MME location:Aachen Germany date:28-sep-2008
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
# (joint) last author

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