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Title: The stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors
Authors: Esch, Heleentje ×
Huyberechts, G
Mertens, R
Maes, Guido
Manca, J
De Ceuninck, W
De Schepper, L #
Issue Date: Jan-2000
Publisher: Elsevier science sa
Series Title: Sensors and actuators b-chemical vol:65 issue:1-3 pages:190-192
Abstract: Good performance of alarm systems and environmental as well as industrial control methods requires an optimal operation of the gas sensors involved. An essential point related to this challenge is an accurate control of the sensor working temperature. Therefore, the stability of the Ti/Pt heater element used in tin oxide thin film gas sensors has been investigated. It turns out that the heater element is influenced by diffusion and oxidation processes taking place during thermal treatment. This is illustrated by RES, AES and XPS measurements. The modifications in chemical composition are also found to influence the electrical characteristics R-o and TCR of the heater. (C) 2000 Elsevier Science S.A Ail rights reserved.
ISSN: 0925-4005
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Quantum Chemistry and Physical Chemistry Section
× corresponding author
# (joint) last author

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