Electrical characterization of InGaAs ultra-shallow junctions
Petersen, Dirch H × Hansen, Ole Boggild, Peter Lin, Rong Nielsen, Peter F Lin, Dennis Adelmann, Christoph Alian, Alireza Merckling, Clement Penaud, Julien Brammertz, Guy Goossens, Jozefien Vandervorst, Wilfried Clarysse, Trudo #
Published for the Society by the American Institute of Physics
Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:28 issue:1 pages:C1C41-C1C47
In this study, we investigate the limitations to sheet resistance and Hall effect characterization of ultra-shallow junctions (USJs) in In0.53Ga0.47As. We compare conventional van der Pauw and Hall effect measurements with micro four-point probe (M4PP) and micro Hall effect methods. Due to the high carrier mobility of InGaAs, we extend the micro-Hall effect position error suppression method to also take geometrical magnetoresistance into account. We find that the conventional techniques fail to measure accurately on n(++)/p(+) USJ due to a significant leakage current, whereas the M4PP and micro Hall effect methods are able to give accurate results. Finally, we observe a significant reduction in the carrier mobility for InGaAs USJ.