Title: Precise nitrogen depth profiling by high-resolution RBS in combination with angle-resolved XPS
Authors: Kimura, K. ×
Nakajima, K.
Conard, T.
Vandervorst, Wilfried
Bergmaier, A.
Dollinger, G. #
Issue Date: Jun-2010
Publisher: North-Holland Physics Pub.
Series Title: Nuclear Instruments & Methods in Physics Research B vol:268 issue:11-12 pages:1960-1963
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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