Title: Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope
Authors: Arstila, K. ×
Hantschel, T.
Kleindiek, S.
Sterr, J.
Vaquette, Q.
Demeulemeester, C.
Vandervorst, Wilfried #
Issue Date: Aug-2010
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:87 issue:5-9 pages:1410-1412
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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