Title: Analysis of Ultra-Thin HfO2/SiON/Si(001): Comparison of Three Different Techniques
Authors: Kimura, K. ×
Nakajima, K.
Conard, T.
Vandervorst, Wilfried
Bergmaier, A.
Dollinger, G. #
Issue Date: Feb-2010
Publisher: The Society
Series Title: Analytical Sciences vol:26 issue:2 pages:223-226
ISSN: 0910-6340
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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