Title: Electron beam induced etching of silicon with SF6
Authors: Vanhove, N. ×
Lievens, P.
Vandervorst, Wilfried #
Issue Date: 2010
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures pages:1206-1209
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science