Title: Study of submelt laser induced junction nonuniformities using Therma-Probe
Authors: Rosseel, E. ×
Bogdanowicz, J.
Clarysse, T.
Vandervorst, Wilfried
Ortolland, C.
Hoffmann, T.
Salnik, A.
Nicolaides, L.
Han, S.
Petersen, D.
Lin, R.
Hansen, O. #
Issue Date: Jan-2010
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:28 issue:1 pages:C1C21-C1C26
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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