Title: Review of electrical characterization of ultra-shallow junctions with micro four-point probes
Authors: Petersen, D. ×
Hansen, O.
Hansen, T.
Boggild, P.
Lin, R.
Kjaer, D.
Nielsen, P.
Clarysse, T.
Vandervorst, Wilfried
Rosseel, E.
Bennett, N.
Cowern, N. #
Issue Date: Jan-2010
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:28 issue:1 pages:C1C27-C1C33
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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