Title: Electrical demonstration of thermally stable Ni silicides on Si1-xCx epitaxial layers
Authors: Machkaoutsan, V. ×
Verheyen, P.
Bauer, M.
Zhang, Y.
Koelling, S.
Franquet, A.
Vanormelingen, K.
Loo, R.
Kim, C.
Lauwers, A.
Horiguchi, N.
Kerner, C.
Hoffmann, T.
Granneman, E.
Vandervorst, Wilfried
Absil, P.
Thomas, S. #
Issue Date: 2010
Publisher: North-Holland
Series Title: Microelectronic Engineering pages:306-310
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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