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Title: Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on silicon
Authors: Eyben, P. ×
Clemente, F.
Vanstreels, K.
Pourtois, G.
Sankaran, K.
Clarysse, T.
Mody, J.
Duriau, E.
Hantschel, T.
Vandervorst, Wilfried
Mylvaganam, K.
Zhang, L. #
Issue Date: 2010
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures pages:401-406
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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