Title: Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures
Authors: Clarysse, T. ×
Moussa, A.
Parmentier, B.
Bogdanowicz, J.
Vandervorst, Wilfried
Bender, H.
Pfeffer, M.
Schellenberger, M.
Nielsen, P.
Thorsteinsson, S.
Lin, R.
Petersen, D. #
Issue Date: 2010
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures pages:C1C8-C1C14
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science