Title: Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
Authors: Bogdanowicz, J. ×
Dortu, F.
Clarysse, T.
Vandervorst, Wilfried
Rosseel, E.
Nguyen, D.
Shaughnessy, D.
Salnick, A.
Nicolaides, L. #
Issue Date: 2010
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures pages:C1C1-C1C7
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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