Title: Hydrogen quantification in hydrogenated amorphous carbon films by infrared, Raman, and x-ray absorption near edge spectroscopies
Authors: Buijnsters, Josephus Gerardus ×
Gago, R
Jimenez, I
Camero, M
Agullo-Rueda, F
Gomez-Aleixandre, C #
Issue Date: May-2009
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:105 issue:9 pages:093510-1-093510-7
Abstract: In this study, we have employed infrared (IR) absorption spectroscopy, visible Raman spectroscopy, and x-ray absorption near edge structure (XANES) to quantify the hydrogen (HI) content in hydrogenated amorphous carbon (a-C: HI) films. a-C: H films with a hydrogen content varying from 29 to 47 at. % have been synthesized by electron cyclotron resonance chemical vapor deposition at low substrate temperatures (< 120 degrees C) applying a wide range of bias voltage, V-b, (- 300 V < V-b < + 100 V). With the application of high negative V-b, the a-C: II films undergo a dehydrogenation process accompanied by a sharp structural modification from polymer-to fullerenelike films. The trend in the H content derived from elastic recoil detection analysis (ERDA) is quantitatively reproduced from the intensity of the C-H bands and states in the IR and XANES spectra, respectively, as well as from the photoluminescence (PL) background drop in the Raman spectra. Using the H contents obtained by ERDA as reference data, semiquantitative expressions are inferred for the amount of bonded hydrogen as a function of the experimental spectroscopic parameters, i.e., the integrated area of the IR C-H stretching band at about 2900 cm(-1), the PL background in visible Raman spectra, and the XANES intensity of the sigma*-CH peak. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3103326]
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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