Title: Epitaxial growth of Dy2O3 films on SrTiO3 (001) substrates by molecular beam epitaxy
Authors: Bhuiyan, Kabir ×
Menghini, Mariela Andrea
Locquet, Jean-Pierre
Seo, Jin Won
Dieker, Christel
Jaeger, Wolfgang
Marchiori, Chiara #
Issue Date: 6-Jan-2011
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:29 issue:1 pages:1-4
Conference: Workshop on Dielectrics in Microelectronics edition:16 location:Bratislava, Slovakia date:28-30 June 2010
Article number: 01A801
Abstract: Epitaxial Dy2O3 thin films are grown on SrTiO3(001) substrates by molecular beam epitaxy. Structural, morphological, and interfacial properties of the Dy2O3 film are investigated by in situ reflection high-energy electron diffraction (RHEED), ex situ x-ray diffraction (XRD), atomic force microscopy, and cross-sectional transmission electron microscopy (TEM). RHEED patterns and XRD spectra show that the Dy2O3 film is grown epitaxially in a cubic phase with a (001) orientation. The surface of the film is smooth with a rms roughness of 4 Å. The TEM image shows that the Dy2O3 film is crystalline with an abrupt interface between the film and substrate without any indication of a chemical reaction or interdiffusion occurring at the interface.
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Solid State Physics and Magnetism Section
Physical Metallurgy and Materials Engineering Section (-)
× corresponding author
# (joint) last author

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