Title: Trapping in 1nm EOT high-k / MG
Authors: Zahid, M
Pantisano, L
Degraeve, R
Aoulaiche, M
Trojman, L
Ferain, I
San Andres Serrano, E
Shickova, A
O'Connor, R
Groeseneken, Guido
Heyns, Marc
De Gendt, Stefan #
Issue Date: Oct-2008
Publisher: The Electrochemical Society
Host Document: ECS Transactions vol:16 issue:5 pages:77-84
Conference: ECS Meetings edition:214th location:Honolulu, HI date:13-17 October
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
ESAT - MICAS, Microelectronics and Sensors
Department of Materials Engineering - miscellaneous
# (joint) last author

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