Title: Application of combinatorial methodologies for work function engineering of metal gate/high-k advanced gate stacks
Authors: Green, M. ×
Chang, S.
De Gendt, Stefan
Schram, T.
Hattrick-Simpers, J. #
Issue Date: 2007
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:84 issue:9-10 pages:2209-2212
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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