Title: Texture, Twinning, and Metastable "Tetragonal" Phase in Ultrathin Films of HfO2 on a Si Substrate
Authors: MacLaren, I ×
Ras, T
MacKenzie, M
Craven, A. J
McComb, D. W
De Gendt, Stefan #
Issue Date: 2009
Publisher: Electrochemical soc inc
Series Title: Journal of the electrochemical society vol:156 issue:8 pages:G103-G108
Abstract: Thin HfO2 films grown on the lightly oxidized surface of Si(100) wafers have been examined using dark-field transmission electron microscopy and selected area electron diffraction in plan view. The polycrystalline film has a grain size of the order of 100 nm, and many of the grains show evidence of twinning on (110) and (001) planes. Diffraction studies showed that the film had a strong [110] out-of-plane texture and that a tiny volume fraction of a metastable (possibly tetragonal) phase was retained. The reasons for the texture, the twinning, and the retention of the metastable phase are discussed.
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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