Title: Study of interfacial reactions and phase stabilization of mixed Sc, Dy, Hf high-k oxides by attenuated total reflectance infrared spectroscopy
Authors: Hardy, A ×
Adelmann, C
Van Elshocht, S
Van den Rul, H
Van Bael, M. K
De Gendt, Stefan
D'Olieslaeger, M
Heyns, Marc
Kittl, Jorge
Mullens, J #
Issue Date: Jun-2009
Publisher: Elsevier science bv
Series Title: Applied surface science vol:255 issue:17 pages:7812-7817
Abstract: Grazing angle attenuated total reflectance Fourier transform infrared spectroscopy is applied to study ultrathin film Hf4+, Sc3+ and Dy3+ oxides, due to its high surface sensitivity. The (multi) metal oxides studied, are of interest as high-k dielectrics. Important properties affecting the permittivity, such as the amorphous or crystalline phase and interfacial reactions, are characterized.
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
Molecular Design and Synthesis
× corresponding author
# (joint) last author

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