Title: Investigating ESD sensitivity in electrostatic SiGe MEMS
Authors: Sangameswaran, Sandeep ×
De Coster, Jeroen
Linten, Dimitri
Scholz, Mirko
Thijs, Steven
Groeseneken, Guido
De Wolf, Ingrid #
Issue Date: May-2010
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:20 issue:5
Article number: 055005
Abstract: The sensitivity of electrostatically actuated SiGe microelectromechanical systems to electrostatic discharge events has been investigated in this paper. Torsional micromirrors and RF microelectromechanical systems (MEMS) actuators have been used as two case studies to perform this study. On-wafer electrostatic discharge (ESD) measurement methods, such as the human body model (HBM) and machine model (MM), are discussed. The impact of HBM ESD zap tests on the functionality and behavior of MEMS is explained and the ESD failure levels of MEMS have been verified by failure analysis. It is demonstrated that electrostatic MEMS devices have a high sensitivity to ESD and that it is essential to protect them.
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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