Title: Nickel-plated thermal switch with electrostatic latch
Authors: Driesen, Maarten ×
Ceyssens, Frederik
Decoster, Jeroen
Puers, Robert #
Issue Date: 8-Oct-2010
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:164 issue:1-2 pages:148-153
Abstract: An innovative parallel gap bistable switch is demonstrated, based on a nickel-plating process with a polymer mold. It combines two different actuator mechanisms to yield extremely low steady state power consumption: thermal actuation is used for the stroke movement, whereas electrostatic actuation is used to latch the on state. This makes it useful for low-power applications where continuous thermal drive is not possible. Strokes of 20 μm can be achieved, with thermal actuation power of 1 W during the switching movement. In a second stage, the position can be electrostatically held with a voltage of 15 V, requiring no further power. The actuator's size is approximately 1.5 mm^2.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science