Title: Interconnect for Out-of-plane MEMS
Authors: Aarts, Arno
Neves, Hercules
Puers, Robert
Van Hoof, Christiaan #
Issue Date: Sep-2007
Host Document: MME07, 18th workshop on MicroMechanics Europe
Conference: MME edition:18 location:Guimaraes date:16-18 September 2007
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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