Title: Chemisorption Reaction Mechanisms for Atomic Layer Deposition of High-k Oxides on High Mobility Channels
Authors: Delabie, Annelies
Sioncke, Sonja
Van Elshocht, S.
Caymax, Matty
Pourtois, Geoffrey
Pierloot, Kristine #
Issue Date: 2010
Publisher: Electrochemical Society, Inc
Host Document: Electrochemical Society Transactions - ECS Transactions vol:33 issue:2 pages:343-353
Conference: ECS meeting edition:218 location:Las Vegas date:10-15 October 2010
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Quantum Chemistry and Physical Chemistry Section
# (joint) last author

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