|ITEM METADATA RECORD
|Title: ||Chemisorption Reaction Mechanisms for Atomic Layer Deposition of High-k Oxides on High Mobility Channels|
|Authors: ||Delabie, Annelies|
Van Elshocht, S.
Pierloot, Kristine #
|Issue Date: ||2010 |
|Publisher: ||Electrochemical Society, Inc|
|Host Document: ||Electrochemical Society Transactions - ECS Transactions vol:33 issue:2 pages:343-353|
|Conference: ||ECS meeting edition:218 location:Las Vegas date:10-15 October 2010|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Quantum Chemistry and Physical Chemistry Section|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.
© Web of science