Title: Measurement of liquid properties using a vibrating clamped-clamped beam structure
Authors: Reichel, Erwin ×
Weiss, Bernhard
Jakoby, Bernhard
Kepler, Johannes
Riesch, Christian #
Issue Date: 2008
Publisher: Oldenbourg verlag
Series Title: Tm-technisches messen vol:75 issue:2 pages:84-90
Abstract: In this contribution the concept of a viscosity and mass density sensor for the liquid phase based on a vibrating clamped-clamped beam structure is investigated. The liquid's influence on the frequency response is modelled by calculating the resistance force acting on the structure by numerically solving the two-dimensional flow and pressure fields in the cross sectional plane. Besides presenting a micromachined prototype in silicon technology, measurements have been carried out with a PMMA-based sensor element featuring an electromagnetic actuation and an inductive readout. A simple optical method is used to verify the measured frequency response.
ISSN: 0171-8096
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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