Sensors and actuators a-physical vol:156 issue:1 pages:222-228
This paper focuses on the fluid-structure interaction of a sensor cell for the measurement of mass density and viscosity. Two polymer diaphragms, constituting the top and bottom of the sensor cell carrying conductive paths, exert time-harmonic forces on the sample liquid. The resulting motion is read out using the induced voltage in a secondary path on the diaphragm. The fluid motion analysis is based on potential flow and shear wave solutions at the boundary layer. The device modeling is presented and the results are experimentally verified. (C) 2009 Elsevier B.V. All rights reserved.