Title: Pulsed laser deposition of bismuth telluride thin films for microelectromechanical systems thermoelectric energy harvesters
Authors: Aziz, Ahmed Abdel ×
Elsayed, Mohannad
Abu Bakr, Hassan
El-Rifai, Joumana
Van der Donck, Tom
Celis, Jean-Pierre
Leonov, Vladimir
Fiorini, Paolo
Sedky, Sherif #
Issue Date: Sep-2010
Publisher: Minerals, Metals & Materials Society and IEEE
Series Title: Journal of Electronic Materials vol:39 issue:9 pages:1920-1925
Conference: 28th International Conference on Thermoelectrics/7th European Conference on Thermoelectrics location:Freiburg, Germany date:26-30 July 2009
Abstract: This article reports on the development of thin films of p- and n-type bismuth telluride compounds which are suitable for microelectromechanical systems (MEMS) thermoelectric energy harvesters. Films were prepared by the pulsed laser deposition technique. It is shown that the thin films of binary Bi-Te alloys outperformed considerably their ternary counterparts. Furthermore, the highest thermoelectric figure of merit (ZT) was found to be 0.39 for the p-type Bi32Te68 alloy, whereas the optimal n-type alloy was Bi25Te75, which was characterized by a relatively low stress gradient.
ISSN: 0361-5235
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
Chemical and Extractive Metallurgy Section (-)
× corresponding author
# (joint) last author

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