Title: A new method to determine the mechanical resonance frequency and charging in electrostatically actuated mems
Authors: Kalicinski, S. ×
Tilmans, H.A.C.
Wevers, Martine
De Wolf, Ingrid #
Issue Date: 2008
Series Title: Microelectronics Reliability vol:48 issue:8-9 pages:1221-1226
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Mechanical Metallurgy Section (-)
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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