Title: H2O- and O3-based atomic layer deposition of high-K dielectric films on GeO2 passivation layers
Authors: Delabie, Annelies ×
Alian, Ali Reza
Bellenger, Florence
Caymax, Matty
Conard, Thierry
Franquet, Alexis
Sioncke, Sonja
Van Elshocht, Sven
Heyns, Marc
Meuris, Marc #
Issue Date: 2009
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:156 issue:10 pages:G163-G167
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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