Title: Influence of the strain-relaxation induced defect creation on the lekage current of embedded Si1-xGex source/drain junctions
Authors: Bargallo Gonzalez, Mireia ×
Simoen, Eddy
Vissouvanadin Soubaretty, Bertrand
Eneman, Geert
Verheyen, Peter
Loo, Roger
Claeys, Cor
Machkaoutsan, Vladimir
Tomasini, Pierre
Thomas, Shawn #
Issue Date: Jun-2009
Publisher: Wiley-VCH
Host Document: Physica Status Solidi C vol:6 issue:8 pages:1901-1905
ISSN: 1610-1634
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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