Title: Interface stability in advanced high-k-metal-gate stacks
Authors: Adelmann, Christoph ×
Franquet, Alexis
Conard, Thierry
Witters, Thomas
Ferain, Isabelle
Meersschaut, Johan
Jurczak, Malgorzata
De Meyer, Kristin
Kittl, Jorge
Van Elshocht, Sven #
Issue Date: 2009
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:27 issue:3 pages:1021-1025
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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