Title: Characterization and optimization of polycrystalline Si70%Ge30% for surface micromachined thermopiles in human body applications
Authors: Wang, Ziyang ×
Fiorini, Paolo
Leonov, Vladimir
Van Hoof, Chris #
Issue Date: 2009
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:19 issue:9
Article number: 94011
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science