ITEM METADATA RECORD
Title: Copper CMP with composite polymer core - silica shell abrasives: A defectivity study
Authors: Armini, Silvia ×
Whelan, Caroline
Moinpour, Mansour
Maex, Karen #
Issue Date: 2009
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:156 issue:1 pages:H18-H26
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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