Title: Synthesis of few-layer graphene via microwave plasma-enhanced chemical vapour deposition
Authors: Malesevic, Alexander ×
Vitchev, Roumen
Schouteden, Koen
Volodin, Alexander
Zhang, Liang
Van Tendeloo, Gustaaf
Vanhulsel, Annick
Van Haesendonck, Christian #
Issue Date: Jul-2008
Publisher: Iop publishing ltd
Series Title: Nanotechnology vol:19 issue:30 pages:1-6
Article number: 305604
Abstract: If graphene is ever going to live up to the promises of future nanoelectronic devices, an easy and cheap route for mass production is an essential requirement. A way to extend the capabilities of plasma-enhanced chemical vapour deposition to the synthesis of freestanding few-layer graphene is presented. Micrometre-wide flakes consisting of four to six atomic layers of stacked graphene sheets have been synthesized by controlled recombination of carbon radicals in a microwave plasma. A simple and highly reproducible technique is essential, since the resulting flakes can be synthesized without the need for a catalyst on the surface of any substrate that withstands elevated temperatures up to 700 degrees C. A thorough structural analysis of the flakes is performed with electron microscopy, x-ray diffraction, Raman spectroscopy and scanning tunnelling microscopy. The resulting graphene flakes are aligned vertically to the substrate surface and grow according to a three-step process, as revealed by the combined analysis of electron microscopy and x-ray photoelectron spectroscopy.
ISSN: 0957-4484
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Solid State Physics and Magnetism Section
× corresponding author
# (joint) last author

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