Actuator 2010, 12th International Conference on New Actuators location:Bremen, Germany date:14-16 June 2010
In this paper, a suspension for a multi-mode piezomotor is discussed. The first mode is a direct drive mode which is used to achieve high precision movements while the second mode is a resonant mode which supports high speed movements. To support the operation of both modes, a suspension with appropriate specifications is required. The suspension needs to fulfill the following criteria: high stiffness in the driving direction (to support the direct drive mode), and high flexibility in the normal direction to the slider (to maintain contact when the drive point wears out and to have a low variation on the preload due to non-straightness of the guide ways). Both finite element and analytic structural models have been used to develop a suspension that fulfills these demands. To validate the design, a prototype is produced, and the stiffness is measured using frequency response measurements and displacement measurements.