Title: Defect engineering aspects of advanced Ge process modules
Authors: Claeys, Corneel ×
Simoen, Eddy
Opsomer, Karl
Brunco, David
Meuris, Marc #
Issue Date: Dec-2008
Publisher: Elsevier Sequoia
Series Title: Materials Science and Engineering B, Solid-State Materials for Advanced Technology vol:154-155 pages:49-55
ISSN: 0921-5107
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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