Title: Impact strain engineering on gate stack quality and reliability
Authors: Claeys, Corneel ×
Simoen, Eddy
Put, Sofie
Giusi, G.
Crupi, F. #
Issue Date: 2008
Publisher: Pergamon Press
Series Title: Solid-State Electronics vol:52 issue:8 pages:1115-1126
ISSN: 0038-1101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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