Title: Mobility and dielectric quality of 1-nm EOT HfSiON on Si(110) and (100)
Authors: Trojman, Lionel ×
Pantisano, Luigi
Ferain, Isabelle
Severi, Simone
Maes, Herman
Groeseneken, Guido #
Issue Date: 2008
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Transactions on Electron Devices vol:55 issue:12 pages:3414-3420
ISSN: 0018-9383
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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