Title: Leakage current study of Si1-xCx embedded source/drain junctions
Authors: Simoen, Eddy ×
Vissouvanadin Soubaretty, Bertrand
Taleb, Nadjib
Bargallo Gonzalez, Mireia
Verheyen, Peter
Loo, Roger
Claeys, Corneel
Machkaoutsan, Vladimir
Bauer, Matthias
Thomas, Shawn
Lu, J.-P.
Wise, Rick #
Issue Date: Jul-2008
Publisher: New York
Series Title: Applied Surface Science vol:254 issue:19 pages:6140-6143
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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