Title: Influence of absorbed water components on SiOCH low-k reliability
Authors: Li, Yunlong ×
Ciofi, Ivan
Carbonell, Laure
Heylen, Nancy
Van Aelst, Joke
Baklanov, Mikha�
Groeseneken, Guido
Maex, Karen
Tokei, Zsolt #
Issue Date: Aug-2008
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:104 issue:3
Article number: 034113
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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