Title: Composite polymer core � Ceria shell abrasive particles during Oxide CMP: A defectivity study
Authors: Armini, Silvia ×
De Messemaeker, Joke
Whelan, Caroline
Moinpour, Mansour
Maex, Karen #
Issue Date: 2008
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:155 issue:9 pages:H653-H660
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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