ITEM METADATA RECORD
Title: Composite polymer core-silica shell abrasives: the effect of the shape of the silica particles on oxide CMP
Authors: Armini, Silvia ×
Whelan, Caroline
Moinpour, Mansour
Maex, Karen #
Issue Date: 2008
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:155 issue:6 pages:H401-H406
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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