Title: Influence of extreme thinning on 130nm CMOS devices for 3D integration
Authors: De Munck, Koen ×
Chiarella, Thomas
De Moor, Piet
Swinnen, Bart
Van Hoof, Chris #
Issue Date: 2008
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Electron Device Letters vol:29 issue:4 pages:322-324
ISSN: 0741-3106
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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