Title: Study and estimation of the residual stress in porous silicon layer formed on the surface of a crystalline silicon substrate
Authors: Ghannam, Moustafa ×
Hassan, Mostafa Medhat
Depauw, Valerie
Beaucarne, Guy
Poortmans, Jef
Mertens, Robert Pierre #
Issue Date: 2008
Publisher: Elsevier Sequoia
Series Title: Thin Solid Films vol:516 issue:20 pages:6924-6929
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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