Title: Workfunction (WF) simulations of Ta/HfO2 and Ta2C/La2O3/HfO2 capped high-k stacks
Other Titles: Physics and Technology of High-k Gate Technologies 5
Authors: Van der Heyden, N ×
Pourtois, G
De Gendt, Stefan
Heyns, Marc
Stesmans, Andre #
Issue Date: 2007
Publisher: Electrochemical Society, Inc
Series Title: Electrochemical Society Transactions - ECS Transactions vol:11
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.