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Title: Impact of donor concentration, electric field, and temperature effects on the leakage current in germanium p+/n junctions
Authors: Eneman, Geert ×
Wiot, Maxime
Brugere, Antoine
Sicart I Casain, O. Oriol
Sonde, Sushant
Brunco, David P
De Jaeger, Brice
Satta, Alessandra
Hellings, Geert
De Meyer, Kristin
Claeys, Corneel
Meuris, Marc
Heyns, Marc M
Simoen, Eddy #
Issue Date: Sep-2008
Publisher: Ieee-inst electrical electronics engineers inc
Series Title: Ieee transactions on electron devices vol:55 issue:9 pages:2287-2296
Abstract: This paper presents an analysis of junction leakage in heavily doped p+/n germanium junctions, targeted for short-channel transistor fabrication. There exists an optimal p+/n junction condition, with a doping concentration of I X 10(17) -5 x 10(17) cm(-3), where the area-leakage-current density is minimal. Use of a halo-implant condition optimized for our 125-nm gate-length pMOS devices shows less than one decade higher area leakage than the optimal p+/n junction. For even higher doping levels, the leakage density increases strongly. Therefore, careful optimization of p+/n junctions is needed for decananometer germanium transistors. The junction leakage shows good agreement with electrical simulations, although for some implant conditions, more adequate implant models are required. Finally, it is shown that the area-junction static-power consumption for the best junctions remains below the power-density specifications for high-performance applications.
ISSN: 0018-9383
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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